![hkmg process flow](https://host.easylife.tw/pics/201212/Czech22_IronGate/IMG_2727.jpg)
由CQin著作·2013·被引用1次—Inthispaper,aprocesschallengeofintegratingDualStressLiner.(DSL)(1)-(2)intogate-lastHigh-k/MetalGate(HKMG)flowis.,ProcessflowofNSFETconsideringHKMGwithgate-lastprocess.(a)and(b)AfterfinformationbasedonSi/SiGestack,(c)-(e)...
The fabrication process flow of pMOSFETs using HKMG
- metal gate半導體
- Semiconductor gate
- metal gate中文
- high k metal gate原理
- hk metal gate
- Gate-last process
- High-k metal gate process flow
- metal gate製程
- metal gate中文
- metal gate poly gate
- metal gate
- high k metal gate原理
- hkmg process flow
- metal gate
- metal gate半導體
- MOSFET structure
- metal gate台積電
- metal gate poly gate
- metal gate好處
- stage gate process
- high k metal gate製程
- hkmg process flow
- high k metal gate製程
- metal gate
- high k metal gate process
ThefabricationprocessflowofpMOSFETsusingHKMG-lastintegrationscheme.Cross-sectionalscanningelectronmicroscopyimagesoffabricatedpMOSFETsarealso ...
** 本站引用參考文章部分資訊,基於少量部分引用原則,為了避免造成過多外部連結,保留參考來源資訊而不直接連結,也請見諒 **